The Alpha and the Omega of Korean Air-Bearing Technology.
We are continuously working to achieve our goals.
Products
Stage Chuck
Body Materials | Ceramic, SUS, AL |
---|---|
Porous Material | Ceramic (Al2O3, SiC, ZrO2,…) |
Chuck Size | 4~12 inch |
Top Flatness | within 3~5µm |
Porous Grain Tearoff | none |
Product Deformation (Temperature Change) |
none |
Utility (Vacuum, Air, Water) |
none |